Manz Automation - high-tech made by manz

For the purposes of quality control, Manz manufactures complete wafer testing systems, which are used by wafer manufacturers for their end-of-line inspection and by cell manufacturers for their receiving inspections. The testers and sorters are characterized by their modular design and can be equipped with a variety of testing and measuring systems:

• Testing the wafer’s geometry
• Testing for micro-cracks
• Measuring the wafer’s level of contamination
• Measuring the electrical resistance and carrier lifetime
• Measuring the thickness of the wafers and the total thickness variation
• Measuring the saw marks
• Measuring bow and warp

After further production steps, the cell-testing and -sorting modules in the back-end area of the plant measure the various levels of quality and sort each cell into the designated module class. The cell testers are suitable for both end-of-line inspections after manufacturing cells as well as for carrying out receiving inspections when manufacturing modules. The system can be equipped with the following testing and measuring systems:

• I/V measurement (sun simulator)
• Measuring with electroluminescence
• Front-side printing inspection
• Back-side printing inspection
• Color measurement
• 3D measurement

All systems are equipped with Manz automation systems and guarantee the lowest-possible breakage rates as well as a high level of tool availability and throughput.

Manz’s quality-control and metrology systems also test the quality of wafers and cells in all important process steps within the production line, thereby increasing the productivity of the systems and assuring the quality of the products.